Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Multiple Frequency Solidly Mounted BAW Filters
Year:2011
Research Areas
  • Electronic technology and of the communications
Information
Abstract
This paper reports the simultaneous fabrication of Receive and Transmit Bulk Acoustic Wave filters for the WCDMA standard on the same die. Both filters are based on Solidly Mounted Resonators using a common Bragg mirror, but with each having a specific piezoelectric film thickness. Electrical measurements reveal that the process steps required to provide the two different piezoelectric film thicknesses on the same die does not impact the electrical performances of resonators and filters and that this approach could thus be generalised to more than two filters.
International
Si
Congress
2011 IEEE International Frequency Control Symposium
960
Place
San Francisco, EE. UU.
Reviewers
Si
ISBN/ISSN
1075-6787
10.1109/FCS.2011.5977800
Start Date
01/05/2011
End Date
05/05/2011
From page
1
To page
5
2011 IEEE International Frequency Control Symposium Proc.
Participants
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Alexandre Reinhardt (CEA LETI, Minatec Campus, Grenoble, France)
  • Autor: Jean-Baptiste David (CEA LETI, Minatec Campus, Grenoble, France)
  • Autor: Christine Fuchs (CEA LETI, Minatec Campus, Grenoble, France)
  • Autor: Nick Rimmer (SPP Process Technology Systems UK Ltd.)
  • Autor: Steve Burgess (SPP Process Technology Systems UK Ltd.)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)