Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
Year:2012
Research Areas
  • Physics - Structure of materials,
  • Physics - Radiation physics,
  • Physics - Soft condensed matter
Information
Abstract
Nitrogen sputtering yields as high as 104 atoms/ion, are obtained by irradiating N-rich-Cu3N films (N concentration: 33 ± 2 at.%) with Cu ions at energies in the range 10?42 MeV. The kinetics of N sputtering as a function of ion fluence is determined at several energies (stopping powers) for films deposited on both, glass and silicon substrates. The kinetic curves show that the amount of nitrogen release strongly increases with rising irradiation fluence up to reaching a saturation level at a low remaining nitrogen fraction (5?10%), in which no further nitrogen reduction is observed. The sputtering rate for nitrogen depletion is found to be independent of the substrate and to linearly increase with electronic stopping power (Se). A stopping power (Sth) threshold of ?3.5 keV/nm for nitrogen depletion has been estimated from extrapolation of the data. Experimental kinetic data have been analyzed within a bulk molecular recombination model. The microscopic mechanisms of the nitrogen depletion process are discussed in terms of a non-radiative exciton decay model. In particular, the estimated threshold is related to a minimum exciton density which is required to achieve efficient sputtering rates.
International
Si
JCR
Si
Title
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials And Atoms
ISBN
0168-583X
Impact factor JCR
1,211
Impact info
Volume
289
http://dx.doi.org/10.1016/j.nimb.2012.07.034
Journal number
From page
74
To page
78
Month
AGOSTO
Ranking
Q2
Participants
  • Autor: Nuria Gordillo Garcia (UPM)
  • Autor: R. Gonzalez-Arrabal
  • Autor: A. Rivera
  • Autor: F. Munnik
  • Autor: F. Agulló-López
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Fusión Nuclear Inercial y Tecnología de fusión
  • Departamento: Ingeniería Nuclear
  • Centro o Instituto I+D+i: Instituto de Fusión Nuclear
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)