Memorias de investigación
Artículos en revistas:
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Año:2012
Áreas de investigación
  • Tecnología electrónica y de las comunicaciones
Datos
Descripción
The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users? ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs? mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.
Internacional
Si
JCR del ISI
No
Título de la revista
2012 IEEE International Ultrasonics Symposium Proceedings
ISSN
1051-0117
Factor de impacto JCR
Información de impacto
Volumen
DOI
10.1109/ULTSYM.2012.0386
Número de revista
Desde la página
1545
Hasta la página
1548
Mes
SIN MES
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Participantes
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Centro o Instituto I+D+i: Instituto Universitario de Sistemas Optoelectrónicos y Microtecnología
  • Departamento: Tecnología Electrónica