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Memorias de investigación
Communications at congresses:
Parameterization of dry laser doping in c-Si with ns DPSS laser sources
Year:2012
Research Areas
  • Engineering
Information
Abstract
In this work we present a study of laser-assisted local dopant diffusion in p-type c-Si wafers with standard ns DPSS laser sources emitting at different wavelengths. We used phosphorous doped amorphous silicon carbide films (a-SiCx(n)) for n+-p crystalline silicon diode fabrication in p- type c-Si wafers by means of laser irradiation, determining parametric windows that lead to high rectifying factors in the defined junctions. We include a discussion of the influence on the process of critical laser parameters, as laser wavelength and accumulated fluence, studying the morphology and the dark J-V characteristics for different irradiation conditions. Additionally, and for some selected processing conditions, Secondary Ion Mass Spectroscopy measurements are included to assess the doping profile obtained in the bulk material. An interesting conclusion of this study, and that is discussed in the work, is that best electrical conditions are obtained, for all the wavelengths investigated, for fluence values around the ablation threshold of the solid film used as dopant precursor. Finally, we include a brief discussion concerning the potential application of these processes for selective emitter formation in high efficiency c-Si solar cells, remarking the importance of using low cost laser sources ready to implement in production lines.
International
Si
Congress
E-MRS Spring 2012 - Symposium V. Laser materials processing for micro and nano applications.
960
Place
Estrasburgo (Francia)
Reviewers
Si
ISBN/ISSN
CDP08UPM
Start Date
14/05/2012
End Date
18/05/2012
From page
1
To page
1
E-MRS Spring 2012 Full Program Symposium V. Laser materials processing for micro and nano applications. Publicación electrónica en la web del congreso http://www.emrs-strasbourg.com/
Participants
  • Autor: Carlos Luis Molpeceres Alvarez (UPM)
  • Autor: Maria Isabel Sanchez Aniorte (UPM)
  • Autor: Sara Núñez Sánchez (UPM)
  • Autor: Miguel Morales Furio (UPM)
  • Autor: M. Colina (UPC)
  • Autor: I. Martín (UPC)
  • Autor: C. Voz (UPC)
  • Autor: R. Alcubilla (UPC)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Grupo de Investigación en Ingeniería y Aplicaciones del Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Departamento: Física Aplicada a la Ingeniería Industrial
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