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Memorias de investigación
Ponencias en congresos:
Exploring polysilicon deposition conditions through a laboratory CVD prototype
Año:2012
Áreas de investigación
  • Química,
  • Tecnología electrónica y de las comunicaciones,
  • Industria química
Datos
Descripción
Cost and energy consumption related to obtaining polysilicon impact significantly on the total photovoltaic module cost and its energy payback time. Process simplifications can be performed, leading to cost reductions. Nowadays, among several approaches currently pursued to produce the so called Solar Grade Silicon, the chemical route, named Siemens process, is the dominant one. At the Instituto de Energía Solar research on this topic is focused on the chemical route, in particular on the polysilicon deposition step by chemical vapor deposition (CVD) from Trichlorosilane through a laboratory prototype. Valuable information about the phenomena involved in the polysilicon deposition process and the operating conditions is obtained from our experiments. A particular feature of our system is the inclusion of a mass spectrometer. The present work comprises spectra characterization of the polysilicon deposition chemical reaction, temperature and inlet gas mixture composition influence on the deposition rate and analysis of polysilicon deposition conditions for the ?pop-corn' phenomenon to appear, based on experimental experience
Internacional
Si
Nombre congreso
E-MRS Spring 2012 - Advanced Silicon Materials Research for Electronic and Photovoltaic Applications III
Tipo de participación
960
Lugar del congreso
Strasbourg (France)
Revisores
Si
ISBN o ISSN
1610-1642
DOI
10.1002/pssc.201200161
Fecha inicio congreso
14/05/2012
Fecha fin congreso
18/05/2012
Desde la página
2164
Hasta la página
2168
Título de las actas
Physica status solidi (c) Special Issue: E-MRS 2012 Spring Meeting ? Symposium A
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: Alba Ramos Cabal (UPM)
  • Autor: Carlos del Cañizo Nadal (UPM)
  • Autor: Javier Valdehita Torija (UPM)
  • Autor: Juan Carlos Zamorano . (UPM)
  • Autor: Araceli Rodriguez
  • Autor: Antonio Luque Lopez (UPM)
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física
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