Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Exploring polysilicon deposition conditions through a laboratory CVD prototype
Year:2012
Research Areas
  • Chemistry,
  • Electronic technology and of the communications,
  • Chemical industry
Information
Abstract
Cost and energy consumption related to obtaining polysilicon impact significantly on the total photovoltaic module cost and its energy payback time. Process simplifications can be performed, leading to cost reductions. Nowadays, among several approaches currently pursued to produce the so called Solar Grade Silicon, the chemical route, named Siemens process, is the dominant one. At the Instituto de Energía Solar research on this topic is focused on the chemical route, in particular on the polysilicon deposition step by chemical vapor deposition (CVD) from Trichlorosilane through a laboratory prototype. Valuable information about the phenomena involved in the polysilicon deposition process and the operating conditions is obtained from our experiments. A particular feature of our system is the inclusion of a mass spectrometer. The present work comprises spectra characterization of the polysilicon deposition chemical reaction, temperature and inlet gas mixture composition influence on the deposition rate and analysis of polysilicon deposition conditions for the ?pop-corn' phenomenon to appear, based on experimental experience
International
Si
Congress
E-MRS Spring 2012 - Advanced Silicon Materials Research for Electronic and Photovoltaic Applications III
960
Place
Strasbourg (France)
Reviewers
Si
ISBN/ISSN
1610-1642
10.1002/pssc.201200161
Start Date
14/05/2012
End Date
18/05/2012
From page
2164
To page
2168
Physica status solidi (c) Special Issue: E-MRS 2012 Spring Meeting ? Symposium A
Participants
  • Autor: Alba Ramos Cabal (UPM)
  • Autor: Carlos del Cañizo Nadal (UPM)
  • Autor: Javier Valdehita Torija (UPM)
  • Autor: Juan Carlos Zamorano . (UPM)
  • Autor: Araceli Rodriguez
  • Autor: Antonio Luque Lopez (UPM)
Research Group, Departaments and Institutes related
  • Creador: Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física
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