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Descripción
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| Subwavelength-Resolution imaging means the capacity of an optical system to produce detailed images unlimited by the wavelength of the light. Subwavelength-Resolution systems are expected to lead to important breakthroughs in several areas, such as optical microscopy or acoustic devices. The wave nature of light sets the ultimate resolution limit of classic optical instruments, due to diffraction. One sector in which this limitation is particularly important is Semiconductor Manufacturing, a market for optical instruments over 6,000 M?/year, because the integrated circuit industry has always sought continued reductions of the smallest-sized features in order to produce faster and more cost-effective semiconductor devices. To achieve this progressive reduction in feature size, the exposure wavelength has needed been reduced to the extreme. In optical Lithography, deep UV light (DUV, from a 193 nm ArF excimer laser) is used in the state-of-the-art commercial products, while the latest systems are based on even shorter wavelengths (EUV, 13.5 nm plasma-emission from Sn). Working at those short wavelengths, let alone using charged particles, introduces formidable technological challenges, so that any alternative optical method is highly desirable. Previous research into Subwavelength-Resolution using negative refractive index (n<0) has not led to practical devices because of the high losses associated to negative dielectric and magnetic constant and the very limited distances required between the object and the image. The positive refractive index has not the aforementioned drawbacks but conventional systems made up of lenses and mirrors do not have Subwavelength-Resolution capabilities. Several research groups have recently found theoretically that there is one family of positive refraction systems, very different from the conventional ones, which achieve perfect imaging in theory and super-resolution in practice. These systems are basically two-dimensional planar waveguides in which the object and the image are embedded, the waveguides are filled with a positive gradual refractive index medium (GRIN waveguides). This is also supported by one very important experimental result: a first prototype that demonstrates Subwavelength-Resolution experimentally for microwave frequencies. The past year another important result has supposed an important advance in Subwavelength-Resolution has been presented, the theoretical demonstration that Geodesic Waveguide, another family of optical devices, has Subwavelength-Resolution capacity. Geodesic Waveguide are bi-dimensional waveguides tridimensionally curved that can be designed to be equivalent to the GRIN waveguides and have the important property of being manufacturable with a homogeneous refractive index core material. The project aim four objectives covered by three workpackage: - To advance in theoretical concepts of Subwavelength-Resolution. The theory of these novel systems is so recent that there are still aspects that need to be studied in depth. - To manufacture and test one Geodesic Waveguide system prototype for microwave frequencies. Up to date Subwavelength-Resolution has been experimentally demonstrated for one specific GRIN waveguide, the Maxwell Fish Eye (MFE). This prototype will demonstrate Subwavelength- Resolution for Geodesic Waveguides and will then validate this technology. - To manufacture and test one GRIN waveguide system prototype with homogeneous object and image spaces. Very interesting alternative for practical applications. - To study the application of the GRIN and Geodesic waveguides to Optical Lithography, as a candidate technology for the future generation of photolithography equipments. | |
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Internacional
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No |
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Tipo de proyecto
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Proyectos y convenios en convocatorias públicas competitivas |
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Entidad financiadora
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Ministerio de Economía y Competitividad |
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Nacionalidad Entidad
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Sin nacionalidad |
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Tamaño de la entidad
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Desconocido |
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Fecha concesión
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