Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Piezoelectric and Electroacoustic Properties of V-Doped and Ta-Doped AlN Thin Films
Year:2013
Research Areas
  • Electronic technology and of the communications
Information
Abstract
In this paper we analyze the effects of doping AlN films with vanadium and tantalum to concentrations up to 6% atomic. The structure and composition of the new compounds are assessed as a function of the dopant concentration by x-ray diffraction (XRD), IR reflectance and Rutherford backscattering spectrometry (RBS). Test devices consisting on bulk acoustic wave resonators are used to assess the piezoelectric activity of the compounds as well as other material properties, such as the acoustic velocities and the piezoelectric constant. Films doped with vanadium show an overall worsening of their main properties for acoustics applications. Films doped with tantalum show variations in their wurtzite crystal structure that suggests that an improvement of the piezoelectric activity can be achieved as long as films exhibiting good crystal quality and homogeneous dipole orientation can be grown.
International
Si
Congress
2013 Joint UFFC, EFTF and PFM Symposium
960
Place
Praga, República Checa
Reviewers
Si
ISBN/ISSN
978-1-4799-0342-9
Start Date
21/07/2013
End Date
25/07/2013
From page
262
To page
265
2013 Joint UFFC, EFTF and PFM Symposium Proceedings
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: José Capilla Osorio (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)