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Memorias de investigación
Communications at congresses:
Acoustic Properties of Carbon Nanotube Electrodes in BAW Resonators
Year:2013
Research Areas
  • Electronic technology and of the communications
Information
Abstract
In this paper the acoustic characterization of a layer of carbon nanotubes (CNT) deposited on AlN solidly mounted resonators is described. The structure of the CNT layer is analyzed by scanning electron microscopy and Raman spectroscopy. The electrical sheet resistance is derived from 4 point probe measurements and from the fitting of the electrical response of the resonators. Values of sheet resistance around 100 ?/? are measured. The longitudinal acoustic velocity is derived from the fitting of the electrical response of the resonators using Mason?s model, by adjusting the overtones produced in the CNT layer. A mean value of 62000 m·s-1 is obtained, although some devices show values around 90000 m·s-1, close to the theoretical value of 100000 m·s-1. Some results on the deposition of CNT layers on metallic top electrodes and their influence on the performance of the resonator are also presented.
International
Si
Congress
2013 Joint UFFC, EFTF and PFM Symposium
960
Place
Praga, República Checa
Reviewers
Si
ISBN/ISSN
978-1-4799-0342-9
Start Date
21/07/2013
End Date
25/07/2013
From page
984
To page
987
2013 Joint UFFC, EFTF and PFM Symposium Proceedings
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: José Capilla Osorio (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Electrónica
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