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Memorias de investigación
Communications at congresses:
IR-Reflectance Assessment of the Tilt Angle of AlN-Wurtzite Films for Shear Mode Resonators
Year:2013
Research Areas
  • Electronic technology and of the communications
Information
Abstract
In this paper we propose the use of infrared spectroscopy as an alternative technique to X-ray diffraction for the assessment of the crystal orientation of aluminum nitride thin films. Infrared scans of samples with different tilt angles of the c-axis are measured to accurately determine the structure of the longitudinal optical absorption band, which is found to be the composition of the contributions of three different populations of grains with different angles of tilt of the c-axis. A direct relationship is established between the wavenumber of these contributions and the actual angle of tilt measured through a XRD ?-scan.
International
Si
Congress
2013 Joint UFFC, EFTF and PFM Symposium
960
Place
Praga, República Checa
Reviewers
Si
ISBN/ISSN
978-1-4799-0342-9
Start Date
21/07/2013
End Date
25/07/2013
From page
118
To page
121
2013 Joint UFFC, EFTF and PFM Symposium Proceedings
Participants
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Moreira Milena (Universidad de Uppsala)
  • Autor: Ilia Katardjiev (Universidad de Uppsala)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Electrónica
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