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Descripción
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| Film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs) have the potential to sig-nificantly improve upon the sensitivity and minimum detection limit of traditional gravimetric sensorsbased on quartz crystal microbalances (QCMs) and surface acoustic wave resonators (SAWs). To date, nei-ther FBAR nor SMR devices have been demonstrated to be superior to the other; hence the choice betweenthem depends primarily on the users? ability to design/fabricate membranes and/or Bragg reflectors. Inthis work, it is shown that identically designed FBAR and SMR devices resonating at the same frequencyexhibit different responsivities to mass loadings, Rm, and that the SMRs are less responsive than theFBARs. For the specific device design and resonant frequency (?2 GHz) of the resonators presented here,the FBARs? mass responsivity is ?20% greater than that of the SMRs?, and although this value is not uni-versal for all possible device designs, it clearly shows that FBAR devices should be favoured over SMRs ingravimetric sensing applications where the FBARs? fragility is not an issue. Numerical calculations basedon Mason?s model offer an insight into the physical mechanisms behind the greater FBARs responsivity,and it was shown that the Bragg reflector has an effect on the acoustic load at one of the facets of thepiezoelectric films which is in turn responsible for the SMRs? lower responsivity to mass loadings. | |
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Internacional
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Si |
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JCR del ISI
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Si |
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Título de la revista
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SENSORS AND ACTUATORS B-CHEMICAL |
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ISSN
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0925-4005 |
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Factor de impacto JCR
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3,898 |
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Información de impacto
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Volumen
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183 |
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DOI
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10.1016/j.snb.2013.03.085 |
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Número de revista
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136 |
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143 |
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Ranking
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0 |