Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Influence of fabrication steps on optical and electrical properties of InN thin films
Year:2014
Research Areas
  • Phisics,
  • Physics - Structure of materials,
  • Electronic devices
Information
Abstract
This paper reports on a case study of the impact of fabrication steps on InN material properties. We discuss the influence of annealing time and sequence of device processing steps. Photoluminescence (PL), surface morphology and electrical transport (electrical resistivity and low frequency noise) properties have been studied as responses to the adopted fabrication steps. Surface morphology has a strong correlation with annealing times, while sequences of fabrication steps do not appear to be influential. In contrast, the optical and electrical properties demonstrate correlation with both etching and thermal annealing. For all the studied samples PL peaks were in the vicinity of 0.7 eV, but the intensity and full width at half maximum (FWHM) demonstrate a dependence on the technological steps followed. Sheet resistance and electrical resistivity seem to be lower in the case of high defect introduction due to both etching and thermal treatments. The same effect is revealed through 1/f noise level measurements. A reduction of electrical resistivity is connected to an increase in 1/f noise level.
International
Si
JCR
Si
Title
Semiconductor Science And Technology
ISBN
0268-1242
Impact factor JCR
2,206
Impact info
Volume
29
doi:10.1088/0268-1242/29/9/095010
Journal number
9
From page
095010-1
To page
095010-8
Month
AGOSTO
Ranking
Participants
  • Autor: Tommaso Brazzini . (UPM)
  • Autor: Javier Grandal Quintana (Paul Drude Institut of Berlin)
  • Autor: Maria del Carmen Sabido Siller (UPM)
  • Autor: Fernando Calle Gomez (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Grupo de Dispositivos Semiconductores del ISOM
  • Centro o Instituto I+D+i: Instituto Universitario de Sistemas Optoelectrónicos y Microtecnología
  • Departamento: Ingeniería Electrónica
  • Departamento: Automática, Ingeniería Eléctrica y Electrónica e Informática Industrial
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)