Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Seed Layer Controlled Deposition of ZnO Films with a Tilted c-axis for Shear Mode Resonators
Year:2014
Research Areas
  • Electronic technology and of the communications
Information
Abstract
We investigate different procedures for achieving ZnO films with the c-axis tilted with respect to the normal for their application in acoustic resonators operating in the shear modes. The approach consists in combining the use of textured surfaces of different nature with off-axis sputtering, which promotes the growth of ZnO with inclined microcrystals. The rough surfaces investigated are porous-SiO2 and AlN and ZnO seed layers films specifically prepared to exhibit textured surfaces. The suitability of these films for the intended applications is tested by analyzing the frequency response of ZnO-based solidly mounted resonators. Electromechanical coupling factors for the shear modes up to 3.3% are achieved.
International
Si
Congress
European frequency and time forum 2014
960
Place
Neuchatel (Suiza)
Reviewers
Si
ISBN/ISSN
978-1-4799-5252-6
Start Date
23/06/2014
End Date
26/06/2014
From page
297
To page
300
Proceedings of the European frequency and time forum 2014
Participants
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: G. Rughoobur (Electrical Engineering Division-University Of Cambridge)
  • Autor: Luis García-Gancedo (Electrical Engineering Division-University of Cambridge)
  • Autor: A.J. Flewitt (Electrical Engineering Division-University of Cambridge)
  • Autor: W. I. Milne (Electrical Engineering Division-University of Cambridge)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
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