Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
AlN shear mode solidly mounted resonator with temperature compensation for in-liquid sensing
Year:2014
Research Areas
  • Electronic technology and of the communications
Information
Abstract
This paper proposes several solutions to adapt AINbased acoustic resonators to sensors for in-liquid applications. The main requirements of these devices are addressed: the growth of AIN films with properly tilted grains for the excitation of shear modes, the isolation of the electrical connections from the microfluidic system that leads the liquid to the sensor active area, and the stability of the frequency response with temperature. We present guidelines for designing acoustic reflectors that allow reducing the TCF of the overall device without degrading the response of the resonators, as well as an optimized layout of the electrical extensions required to separate the electrical contacts from the sensing area. We fabricate shear mode resonators based on AIN tilted films with electrical contacts extended up to 1.5 mm, exhibiting a reduced TCF of -17 ppm/oC, electromechanical coupling factors of 4% and quality factors of 150 when operating in water.
International
Si
Congress
IEEE Sensors
960
Place
Valencia
Reviewers
Si
ISBN/ISSN
978-1-4799-0162-3
Start Date
02/11/2014
End Date
05/11/2014
From page
1
To page
4
IEEE Sensors proceedings
Participants
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Teona Mirea (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
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