Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Short pulse laser microforming of thin metal sheets for MEMS manufacturing.
Year:2007
Research Areas
  • Mechanical engineering
Information
Abstract
Continuous and long-pulse lasers have been used for the forming of metal sheets for macroscopic mechanical applications. However, for the manufacturing of micro-electro-mechanical systems (MEMS), the applicability of such type of lasers is limited by the long-relaxation-time of the thermal fields responsible for the forming phenomena. As a consequence of such slow relaxation, the final sheet deformation state is attained only after a certain time, what makes the generated internal residual stress fields more dependent on ambient conditions and might make difficult the subsequent assembly process for MEMS manufacturing from the point of view of residual stresses due to adjustment.The use of ns laser pulses provides a suitable parameter matching for the laser forming of an important range of sheet components used in MEMS that, preserving the short interaction time scale required for the predominantly mechanic (shock) induction of deformation residual stresses, allows for the successful processing of components in a medium range of miniaturization but particularly important according to its frequent use in such systems.In the present paper, a discussion is presented on the specific features of laser interaction in the timescale and intensity range needed for thin sheet microforming with ns-pulse lasers along with relevant modelling and experimental results and a primary delimitation of the parametric space of the considered class of lasers for the referred processes.
International
Si
JCR
Si
Title
APPL SURF SCI
ISBN
0169-4332
Impact factor JCR
1,406
Impact info
Volume
254
Journal number
0
From page
997
To page
1001
Month
DICIEMBRE
Ranking
Participants
  • Autor: Juan Antonio Porro Gonzalez (UPM)
  • Autor: Oscar Garcia Garcia (UPM)
  • Autor: Jose Luis Ocaña Moreno (UPM)
  • Autor: Juan José García-Ballesteros . (UPM)
  • Autor: Miguel Morales Furio (UPM)
  • Autor: Carlos Luis Molpeceres Alvarez (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Ingeniería y Aplicaciones del Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Departamento: Física Aplicada a la Ingeniería Industrial
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