Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Effect of electrically inactive posphorus versus electrically active phosphorus oniron gettering
Year:2015
Research Areas
  • Solar cells
Information
Abstract
In this study we investigate the efficacy of iron gettering as a function of electrically inactive phosphorus in the emitter in combination with low temperature annealing steps. To achieve different amounts of electrically inactive phosphorus in the emitter a highly doped PSG produced emitter with a large plateau depth of electrical active phosphorus is etched back stepwise by a wet-chemical procedure. Therewith we achieve a gradual reduction in electrically inactive phosphorus with small changes in electrically active phosphorus (?Rsh < 4 ?/sq). After this step, the wafers with different emitters have been annealed at 700 °C for 30 min and the content of Feiin the bulk has been measured using QSS-PC. The results show, (i) that for higher amounts of electrically inactive phosphorusa stronger iron gettering effect can be observed and (ii) that an additional annealing step leads to a significant change of Fei. This means, (i) that anelectricallyinactive phosphorus concentration dependence for iron gettering is observed and (ii) additional annealing steps, below the usual diffusion temperature of phosphorus, can be used to reduce interstitial iron in highly contaminated wafers further.
International
Si
Congress
5th International Conference on Silicon Photovoltaics, SiliconPV 2015
960
Place
Konstanz, Germany
Reviewers
Si
ISBN/ISSN
1876-6102
10.1016/j.egypro.2015.07.040
Start Date
23/03/2015
End Date
25/03/2015
From page
311
To page
315
Energy Procedia - Special Issue. Vol. 77
Participants
  • Autor: Ana Peral Boiza (UPM)
  • Autor: A. Dastgheib-Shirazi
  • Autor: H. Wagner
  • Autor: G. Hahn
  • Autor: Carlos del Cañizo Nadal (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Departamento: Electrónica Física
  • Centro o Instituto I+D+i: Instituto de Energía Solar
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