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Descripción
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| We present initial results on chemical detection using AlN-based solidly mounted resonators (SMR) with integrated carbon nanotube (CNT) forest. The concept is demonstrated by sensing ethanol vapours. For that, single walled-CNT forests are directly grown by chemical vapour deposition onto the SMR top electrodes acting as the active sensing area. Subsequently, CNT forests are decorated with FeOx to boost the sensor selectivity. Increasing concentrations of ethanol induce increasing negative shifts in the SMR resonant frequency due to a gravimetric effect based on molecules adsorption. Motivation and | |
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Internacional
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Si |
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Nombre congreso
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Eurosensors |
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Tipo de participación
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970 |
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Lugar del congreso
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Budapest, Hungría |
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Revisores
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ISBN o ISSN
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DOI
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Fecha inicio congreso
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04/09/2016 |
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Fecha fin congreso
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07/09/2016 |
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Título de las actas
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