Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators
Year:2017
Research Areas
  • Electronic technology and of the communications
Information
Abstract
Thin film acoustic wave resonator based devices require compensation of temperature coefficient of frequency (TCF) in many applications. This work presents the design and fabrication of temperature compensated solidly mounted resonators (SMRs). The characteristics of each material of the layered structure have an effect on the device TCF but depending on the relative position with respect to the piezoelectric material in the stack. The influence of material properties of the different layers composing the device on the TCF is discussed in detail. TCF behavior simulation is done with Mason?s model and, to take into account the deterioration of overall performance due to the finite lateral size and shape of the resonator, we have used 2D and 3D finite element modelling of the resonators. The overall behavior of the device for external loads is predicted. SMRs are designed according to simulations and fabricated with different configurations to obtain TCF as near to zero as possible with an optimized response. Resonators are made by depositing Mo/AlN/Mo piezoelectric stacks on acoustic reflectors. As reflector materials, conductive W and insulating WOx films have been used as high acoustic impedance materials. SiO2 films are used as low acoustic impedance material.
International
Si
JCR
Si
Title
Ultrasonics
ISBN
0041-624X
Impact factor JCR
1,942
Impact info
Datos JCR del año 2014
Volume
74
10.1016/j.snb.2016.01.131
Journal number
From page
153
To page
160
Month
SIN MES
Ranking
Participants
  • Autor: Junaid Munir (Universiti Teknologi Malaysia)
  • Autor: Teona Mirea (UPM)
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: M. A. Saeed (Universiti Teknologi Malaysia;University of Education (Pakistan))
  • Autor: Amiruddin Bin Shaari (Universiti Teknologi Malaysia)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Departamento: Ingeniería Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
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