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Descripción
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| Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indium-tin oxide as the transparent material for the electrodes and a transparent acoustic reflector consisting of alternating layers of SiO2 and Ta2O5 or WO3, to ensure an adequate acoustic confinement while keeping a high transparency. The fabricated devices display an electromechanical coupling coefficient up to 4% and a quality factor Q of 100. The measured transmittance in the visible spectrum (450 - 750 nm) is 75%. | |
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Internacional
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Si |
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Nombre congreso
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European Frequency and Time Forum (EFTF), 2016 |
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Tipo de participación
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960 |
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Lugar del congreso
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York (UK) |
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Revisores
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Si |
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ISBN o ISSN
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978-1-5090-0720-2 |
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DOI
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Fecha inicio congreso
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04/04/2016 |
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Fecha fin congreso
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07/04/2016 |
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Desde la página
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1 |
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Hasta la página
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4 |
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Título de las actas
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Proceedings in European Frequency and Time Forum (EFTF), 2016 |