Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
MEMS actuated piezoelectrically with AlN films
Year:2007
Research Areas
  • Electronics engineering
Information
Abstract
We analyse the mechanical response of a doubly-clamped microbridge actuated piezoelectrically using sputtered AlN, working first as an actuator and then as a resonator. The quasi-static response of the microbridge under DC electrical excitation is measured. Out-of-plane displacements as high as 0.22 mum/V are obtained, which provides an actuation response suitable for RF switching applications. On the other hand, the resonance frequencies of the microbridges are determined by means of laser interferometry. We compare the response of microbridges with different dimensions and different initial buckling (induced by the residual stress of the layers). We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. For a given resonator, a DC bias added to the AC excitation signal allows to fine-tune the resonance frequencies. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 mum-long microbridge.
International
No
JCR
No
Title
2007 Spanish Conference on Electron Devices
ISBN
1-4244-0869-5
Impact factor JCR
0
Impact info
Volume
Journal number
0
From page
226
To page
229
Month
SIN MES
Ranking
Participants
  • Autor: Lucía Vergara Herrero (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Sheila González Castilla (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Javier Malo Gomez (UPM)
  • Autor: Jose Ignacio Izpura Torres (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
  • Departamento: Sistemas Electrónicos y de Control
  • Departamento: Ingeniería Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
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