Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Frequency characterization of AlN piezoelectric resonators
Year:2007
Research Areas
  • Electronics engineering
Information
Abstract
In this paper, we analyze the vibrational spectra of mechanical resonators actuated piezoelectrically with aluminum nitride (AlN) films. The microresonators consist in bimorph cantilevers with different lengths containing a piezoelectric metal/AlN/metal stack supported by a silicon nitride structural layer. The thicknesses of both the AlN and Si3N4 layers are varied between 0.3 mum and 1 mum to study their influence on the mechanical response of the cantilevers. The motion of the cantilevers electrically driven is first assessed by optical laser interferometry; resonant frequencies varying between 100 kHz and 8 MHz are obtained. Additionally, many of the vibrational modes are detected by measuring the changes of the electrical impedance at the resonant frequencies. The mass detection factor of the cantilevers is assessed by measuring the frequency shift after mass loading with thin SiO2 layers. A value of 0.18 fg/Hz is obtained for vibrational modes around MHz.
International
Si
JCR
No
Title
2007 IEEE International Frequency Control Symposium Proc.
ISBN
1075-6787
Impact factor JCR
0
Impact info
Volume
Journal number
0
From page
374
To page
377
Month
SIN MES
Ranking
Participants
  • Autor: Sheila González Castilla (UPM)
  • Autor: Jose Ignacio Izpura Torres (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Javier Malo Gomez (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Jimena Olivares Roza (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
  • Departamento: Sistemas Electrónicos y de Control
  • Departamento: Ingeniería Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)