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Memorias de investigación
Communications at congresses:
MEMS actuated piezoelectrically with AlN films
Year:2007
Research Areas
  • Electronics engineering
Information
Abstract
We analyse the mechanical response of a doubly-clamped microbridge actuated piezoelectrically using sputtered AlN, working first as an actuator and then as a resonator. The quasi-static response of the microbridge under DC electrical excitation is measured. Out-of-plane displacements as high as 0.22 mum/V are obtained, which provides an actuation response suitable for RF switching applications. On the other hand, the resonance frequencies of the microbridges are determined by means of laser interferometry. We compare the response of microbridges with different dimensions and different initial buckling (induced by the residual stress of the layers). We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. For a given resonator, a DC bias added to the AC excitation signal allows to fine-tune the resonance frequencies. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 mum-long microbridge.
International
No
Congress
2007 Spanish Conference on Electron Devices
960
Place
El Escorial, Madrid
Reviewers
Si
ISBN/ISSN
Start Date
31/01/2007
End Date
02/02/2007
From page
To page
Participants
  • Autor: Javier Malo Gomez (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Lucía Vergara Herrero (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Sheila González Castilla (UPM)
  • Autor: Jose Ignacio Izpura Torres (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
  • Departamento: Ingeniería Electrónica
  • Departamento: Sistemas Electrónicos y de Control
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