Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
Year:2007
Research Areas
  • Electronics engineering
Information
Abstract
We present picosecond ultrasonic characterizations on e-beam evaporated Ir thin films and on AlN films deposited by pulsed DC reactive sputtering on Ir. Picosecond ultrasonics is an optical technique which uses ultrashort laser pulses to generate and detect very short acoustic pulses. We first investigate the properties of the Ir films by measuring samples of various thicknesses and deposition parameters. It permits to extract the longitudinal sound velocity, the acoustic impedance and the acoustic losses in the Ir electrode. Second, we focus on AlN on Ir films. We measure the thickness and the sound velocity of an AlN thin layer deposited on an Ir electrode. This work illustrates how useful the picosecond ultrasonic technique can be for introducing a new material in bulk acoustic wave technology.
International
Si
Congress
2007 IEEE International Ultrasonics Symposium
960
Place
Nueva York, Estados Unidos
Reviewers
Si
ISBN/ISSN
Start Date
28/10/2007
End Date
31/10/2007
From page
To page
Participants
  • Participante: Amit Rastogi (Aviza Technology, Inc.)
  • Participante: Arnaud Devos (IENM-CNRS)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Participante: Nick Rimmer (Aviza Technology, Inc.)
  • Autor: Marta Clement Lorenzo (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
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