Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Thermal modelling of laser silicon crystallization
Year:2016
Research Areas
  • Phisics,
  • Physics - Structure of materials,
  • Engineering,
  • Mechanical engineering
Information
Abstract
In this work we present a study of the irradiating time and wavelength influence in laser annealing of amorphous silicon thin films, using both continuous wave and pulsed laser sources emitting at wave- lengths ranging from UV to IR. Experimental characterization of the crystallized samples have been obtained by MicroRaman spectroscopy. A simple thermal finite element model (FEM) has been devel- oped in COMSOL Multiphysics to simulate the process by solving numerically the two dimensional non-linear heat transfer equation with a steady heat source. The local temperature evolution in the ir- radiated area given by the FEM model is compared to the crystalline fraction profiles. The numerical model developed helps to understand the physics underlying and determine the process parameters in which crystalline silicon is obtained without damage or ablation of the silicon surface.
International
Si
Congress
19th European Conference on Mathematics for Industry
960
Place
Santiago de Compostela
Reviewers
Si
ISBN/ISSN
CDP08UPM
http://dx.doi.org/10.15304/cc.2016.968
Start Date
13/06/2016
End Date
17/06/2016
From page
256
To page
256
19th European Conference on Mathematics for Industry: book of Abstracts
Participants
  • Autor: Carlos Luis Molpeceres Alvarez (UPM)
  • Autor: Yu Chen . (UPM)
  • Autor: David Muñoz Martin (UPM)
  • Autor: David Canteli (UPM)
  • Autor: Miguel Morales Furio (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Manufactura Avanzada con Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Departamento: Física Aplicada e Ingeniería de Materiales
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)