Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process
Research Areas
  • Phisics,
  • Engineering,
  • Mechanical engineering
The laser assisted micro structuring of thin films especially for electronic applications without influence the functionality of the multi-layer system e.g. due to melting products is a challenge for the laser micro machining techniques. The P2 scribing of copper indium gallium selenide (CIGS) solar cells on stainless steel carrier foil was studied using shockwave- induced film delamination (SWIFD) patterning. The delamination process is induced by a shock wave generated by the laser ablation of the rear side of the carrier foil. In the present study UV nanosecond laser pulses provided by a KrF excimer laser were used to induce the SWIFD process. The morphology and size of the achieved thin-film structures were studied in dependence on various laser irradiation parameters by optical and scanning electron microscopy (SEM). Furthermore, the materials composition after the laser patterning was analyzed by energy dispersive X-ray spectroscopy (EDX). The temporal sequences of processes involved in the SWIFD process were analyzed with high speed shadowgraph experiments. The results of the present study shows that in dependence on the laser parameter used a large process window exist in which the CIGS thin film can be removed from the substrate without visible thermal modification of the CIGS thin film.
Photonics West 2016
San Francisco, Estados Unidos
Start Date
End Date
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Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
  • Autor: M. Ehrhardt (Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany))
  • Autor: P. Lorenz (Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany))
  • Autor: L. Bayer (Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany))
  • Autor: Carlos Luis Molpeceres Alvarez (UPM)
  • Autor: C. Antonio Herrera (Abengoa)
  • Autor: K. Zimmer (Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany))
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Manufactura Avanzada con Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Departamento: Física Aplicada e Ingeniería de Materiales
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)