Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Transparent thin film bulk acoustic wave resonators
Year:2016
Research Areas
  • Electronic technology and of the communications
Information
Abstract
Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indium-tin oxide as the transparent material for the electrodes and a transparent acoustic reflector consisting of alternating layers of SiO2 and Ta2O5 or WO3, to ensure an adequate acoustic confinement while keeping a high transparency. The fabricated devices display an electromechanical coupling coefficient up to 4% and a quality factor Q of 100. The measured transmittance in the visible spectrum (450 - 750 nm) is 75%.
International
Si
Congress
European Frequency and Time Forum (EFTF), 2016
960
Place
York (UK)
Reviewers
Si
ISBN/ISSN
978-1-5090-0720-2
Start Date
04/04/2016
End Date
07/04/2016
From page
1
To page
4
Proceedings in European Frequency and Time Forum (EFTF), 2016
Participants
  • Autor: Mario DeMiguel-Ramos (University of Cambridge (UK))
  • Autor: Girish Rughoobur (University of Cambridge (UK))
  • Autor: Andrew Flewitt (University of Cambrdige (UK))
  • Autor: Teona Mirea (UPM)
  • Autor: Barbara Diaz Duran (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
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