Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
A 3D-printed device for polymer nanoimprint lithography
Year:2018
Research Areas
  • Optics, electromagnetism
Information
Abstract
Nanoimprint lithography (NIL) is an imprinting technique which has experienced an increasing popularity due to its versatility in fabrication processes. Commercial NIL machines are readily available achieving high quality results; however, these machines involve a relatively high investment. Hence, small laboratories often choose to perform NIL copies in a more rudimentary and cheaper way. A new simple system is presented in this document. It is based on two devices which can be made in-house in plastic by using a 3D printer or in aluminum. Thus, the overall manufacturing complexity is vastly reduced. The presented system includes pressure control and potentially temperature control. Replicas have been made using a sawtooth grating master with a pitch around half micrometre. High quality patterns with low density of imperfections have been achieved in 2.25 cm2 surfaces. The material chosen for the negative intermediary mould is PDMS. Tests of the imprint have been performed using the commercial hybrid polymer Ormostamp.
International
Si
JCR
Si
Title
Review of Scientific Instruments
ISBN
0034-6748
Impact factor JCR
1,336
Impact info
Datos JCR del año 2015
Volume
89
10.1063/1.5009648
Journal number
From page
025106-1
To page
025106-6
Month
FEBRERO
Ranking
Participants
  • Autor: Manuel Caño Garcia (UPM)
  • Autor: Morten Andreas Geday (UPM)
  • Autor: Manuel Gil Valverde (UPM)
  • Autor: Antonio Megias Zarco (UPM)
  • Autor: Jose Manuel Oton Sanchez (UPM)
  • Autor: Patxi Xabier Quintana Arregui (UPM)
Research Group, Departaments and Institutes related
  • Creador: Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Fotónica y Bioingeniería
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)