Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy
Year:2018
Research Areas
  • Materials for mems/nems (microelectromechanical systems /nanoelectromechanical systems),
  • Design and simulation of mems and nems
Information
Abstract
This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflection of sensitive elements using finite element method, a novel structure featuring high concentrated stress profile (HCSP) and locally stiffened membrane (LSM) is built. Curve fittings of the mechanical stress and deflection based on FEM simulation results are performed to establish the relationship between mechanical performance and structure dimension. A combination of FEM and curve fitting method is carried out to determine the structural dimensions. The optimized sensor chip is fabricated on a SOI wafer by traditional MEMS bulk-micromachining and anodic bonding technology. When the applied pressure is 1 psi, the sensor achieves a sensitivity of 30.9 mV/V/psi, a pressure nonlinearity of 0.21% FSS and an accuracy of 0.30%, and thereby the contradiction between sensitivity and linearity is alleviated. In terms of size, accuracy and high temperature characteristic, the proposed sensor is a proper choice for measuring pressure of less than 1 psi.
International
Si
JCR
Si
Title
Sensors
ISBN
1424-8220
Impact factor JCR
2,677
Impact info
Datos JCR del año 2016
Volume
Journal number
From page
439(1)
To page
439(16)
Month
SIN MES
Ranking
Participants
  • Autor: Chuang Li (UPM)
  • Autor: Francisco Cordovilla Baro (UPM)
  • Autor: R. Jagdheesh (UPM)
  • Autor: Jose Luis Ocaña Moreno (UPM)
Research Group, Departaments and Institutes related
  • Creador: Centro o Instituto I+D+i: Centro Laser
  • Departamento: Física Aplicada e Ingeniería de Materiales
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)