Observatorio de I+D+i UPM

Memorias de investigación
Thesis:
Thin film electroacoustic resonators for physical and chemical sensing
Year:2017
Research Areas
  • Electronic technology and of the communications
Information
Abstract
The fields of application of sensing devices are constantly expanding. From industrial processes monitoring to food quality control, sensors play a key role as information collectors, essential for human safeness, costs reduction and efficiency improvement. Their impact is even more pronounced in fields like the healthcare one, where biosensors have become crucial for prognosis and early diagnosis. As a result, high performance, low cost and reliable sensors are more and more demanded. In this context thin film electroacoustic sensors offer high resolution, high sensitivity, simplicity, low size, low manufacturing costs and possibility for array integration. Among this class of devices, thin film bulk acoustic wave resonators (FBARs), and more recently, Lamb wave resonators (LWRs) have attracted considerable attention. In both cases, although their sensing performance in different environments, namely gaseous and liquid, have been already studied, they have still unexplored features or improvement possibilities. This thesis aims at contributing to the field of thin film electroacoustic sensors by expanding the physical and chemical sensing features of AlN-based FBARs, particularly solidly mounted resonators (SMRs), and S0 mode LWR (S0-LWRs).
International
Si
Type
Doctoral
Mark Rating
Sobresaliente cum laude
Date
07/04/2017
Participants
  • Autor: Teona Mirea (UPM)
  • Director: Jimena Olivares Roza (UPM)
  • Director: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
  • Grupo de Investigación: Microsistemas y Materiales Electrónicos
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)