Descripción
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This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process, and advances upon current acoustic device technology. This CMOS-fabricated acoustic mirror will enable the device to be monolithically integrated and fabricated in high volume with reduced post-processing steps compared to the state-of-the-art acoustic based sensors. The CMOS-fabricated acoustic mirror demonstrated good reflectivity with a high quality factor of 500. Experimental results on particulate matter sensing with the CMOS based SMR sensor showed a response of 117 kHz/ng when detecting fine particles (<1 mu m). | |
Internacional
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Si |
Nombre congreso
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2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
Tipo de participación
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960 |
Lugar del congreso
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Berlin, Alemania |
Revisores
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Si |
ISBN o ISSN
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978-1-7281-2007-2 |
DOI
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Fecha inicio congreso
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23/06/2019 |
Fecha fin congreso
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27/06/2019 |
Desde la página
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1242 |
Hasta la página
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1245 |
Título de las actas
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PROCEEDINGS OF THE 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |