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Memorias de investigación
Communications at congresses:
BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
We investigate the performance of aluminum nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) electrodes for applications in WCDMA filters. Ir/AlN/Ir stacks are grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxycarbide (SiOC) and silicon nitride (Si3N4). We have developed the technological processes for the fabrication of filters including the trimming of the Ir top electrode for the tuning of the bandwidth. The influence of the thickness of the top electrode after the tuning process in the performance of the SMRs and filters is analyzed. The performance of the devices is compared with that of SMRs and filters of identical design made with Mo electrodes.
International
Si
Congress
2008 IEEE International Ultrasonics Symposium
960
Place
Beijing, CHINA
Reviewers
Si
ISBN/ISSN
1051-0117
10.1109/ULTSYM.2008.0542
Start Date
02/11/2008
End Date
05/11/2008
From page
2189
To page
2192
2008 IEEE International Ultrasonics Symposium Proceedings
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Sheila González Castilla (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica
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