Memorias de investigación
Ponencias en congresos:
Piezoelectric Microresonators Based on Aluminim Nitride for Mass Sensing Applications
Año:2008
Áreas de investigación
  • Industria electrónica
Datos
Descripción
In this work we analyze the vibrational behavior of microresonators (cantilevers and bridges) actuated with piezoelectric aluminum nitride (AlN) films, to investigate the suitability of these devices as mass sensors. The resonators of different geometries consisted of a freestanding unimorph structure made up of a metal/AlN/metal piezoelectric stack supported by a Si3N4 structural layer. The out-of-plane motion of the resonators was assessed by laser interferometry. The electrical impedance of the devices exhibited significant variations at some resonant frequencies ranging from 0.5 MHz to 13 MHz. The mass sensitivity of the microresonators was evaluated through the frequency shift of the resonant modes when loading the resonators with SiO2 films. High order resonant modes provided higher mass sensitivities, with values as low as 6 ag/Hz, which improved significantly our previous results.
Internacional
Si
Nombre congreso
IEEE SENSORS 2008 Conference
Tipo de participación
960
Lugar del congreso
Lecche, Italia
Revisores
Si
ISBN o ISSN
978-1-4244-2580-8
DOI
10.1109/ICSENS.2008.4716483 Summary: In this wor
Fecha inicio congreso
26/10/2008
Fecha fin congreso
28/10/2008
Desde la página
486
Hasta la página
489
Título de las actas
IEEE SENSORS 2008 Conference Proceedings
Esta actividad pertenece a memorias de investigación
Participantes
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Sistemas Electrónicos y de Control
  • Departamento: Tecnología Electrónica
  • Departamento: Ingeniería Electrónica