Observatorio de I+D+i UPM

Memorias de investigación
Book chapters:
Plasma basic concepts and nitrogen containing plasmas
Year:2008
Research Areas
  • Magnetic materials
Information
Abstract
well as the typical characterization methods currentlyavailable. A brief overview about some plasmaapplications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitridesand dilute nitrides are given, showing some interesting research works performed to that purpose,and giving the usual characterization techniquescommonly used in such processes.
International
Si
Book Edition
1
Book Publishing
Transworld Research
ISBN
81-7895-250-5
Series
Book title
Nitrides and dilute nitrides: Growth, physics and devices (2008).
From page
15
To page
46
Participants
  • Participante: ISABEL TANARRO (CSIC)
  • Autor: M. del Mar Sanz Lluch (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Grupo de dispositivos magnéticos del ISOM
  • Centro o Instituto I+D+i: Instituto Universitario de Sistemas Optoelectrónicos y Microtecnología
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)