Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Optimization of the luminescence emission of Si nanocrystals synthesized from non-stoichiometric Si oxides using a Central Composite Design of the deposition process
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
Si oxide films with a controlled excess of Si were deposited on Si wafers by LPCVD using Si2H6 and O2, thermally annealed to 1100 ◦C for 1 h to form Si nanocrystals embedded in SiO2 and subsequently annealed at 450 ◦C in forming gas. The samples were characterized by Fourier transform infrared spectroscopy, spectroscopic ellipsometry and cathodoluminescence spectroscopy. The excess of Si in the as-deposited samples, ranging from 0 to 70% in volume, was obtained from the ellipsometry data analysis. After annealing at 1100 ◦C, the samples show a luminescence band (peaking at 665 nm) at 80K and at room temperature which is associated to the presence of Si nanocrystals. The growth rate, the excess of Si incorporated to the films and the intensity of the luminescence band were modelled using a Face-Centered Central Composite Design as a function of the main deposition variables (pressure, 185–300mTorr; temperature, 250–400 ◦C; Si2H6/O2 flow ratio, 2–5) aiming to control the growth process and the incorporation of Si in excess as well as to determine the experimental conditions that yield the samples with the maximum intensity of the luminescence emission. © 2007 Elsevier B.V. All rights reserved.
International
Si
JCR
Si
Title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECH
ISBN
0921-5107
Impact factor JCR
1,33
Impact info
Volume
2-3
10.1016/j.mseb.2007.08.016
Journal number
147
From page
195
To page
199
Month
AGOSTO
Ranking
Participants
  • Autor: Jesus Sangrador Garcia (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)