Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Influence of the crystallization process on the luminescence of multilayers of SiGe nanocrystals embedded in SiO2
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
Multilayers of SiGe nanocrystals embedded in an oxide matrix have been fabricated by low-pressure chemical vapor deposition of SiGe and SiO2 onto Si wafers (in a single run at 390 ◦C and 50mTorr, using GeH4, Si2 H6 and O2) followed by a rapid thermal annealing treatment to crystallize the SiGe nanoparticles. The main emission band is located at 400 nm in both cathodoluminescence and photoluminescence experiments at 80K and also at room temperature. The annealing conditions (temperatures ranging from 700 to 1000 ◦C and for times of 30 and 60 s) have been investigated in samples with different diameter of the nanoparticles (from ≈3 to ≥5 nm) and oxide interlayer thickness (15 and 35 nm) in order to establish a correlation between the rystallization of the nanoparticles, the degradation of their composition by Ge diffusion and the intensity of the luminescence emission band. Structures with small nanoparticles (3–4.5 nm) separated by thick oxide barriers (≈35 nm) annealed at 900 ◦C for 60 s yield the maximum intensity of the luminescence. An additional treatment at 450 ◦C in forming gas for dangling-bond passivation increases the intensity of the luminescence band by 25–30%.
International
Si
JCR
Si
Title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECH
ISBN
0921-5107
Impact factor JCR
1,33
Impact info
Volume
2-3
10.1016/j.mseb.2007.08.015
Journal number
147
From page
200
To page
204
Month
AGOSTO
Ranking
Participants
  • Autor: Jesus Sangrador Garcia (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)