Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
High aspect-ratio SU-8 resist nano-pillar lattice by e-beam direct writing and its application for liquid trapping
Year:2009
Research Areas
  • Mechanical engineering,
  • Magnetic materials
Information
Abstract
We report the fabrication of periodic lattices of high aspect-ratio nano-pillars made of SU-8 polymeric material by using direct electron-beam writing. Process parameters are optimized in order to control proximity effects and photoacid-generator diffusion determining feature resolution and material stiffness. We demonstrate nanostructured surfaces consisting of lattices of SU-8 nano-pillars with aspectratio as high as 3.8:1, improving previous reported results significantly. We also show the capability of these structures to trap liquid¿water infiltrated among the SU-8 nano-pillars after proper chemical treatment.
International
Si
JCR
Si
Title
MICROELECTRONIC ENGINEERING
ISBN
0167-9317
Impact factor JCR
1,583
Impact info
Volume
87
doi:10.1016/j.mee.2009.09.007
Journal number
4
From page
663
To page
667
Month
ABRIL
Ranking
Participants
  • Autor: David Lopez-Romero Moraleda (UPM)
  • Autor: Carlos Angulo Barrios (UPM)
  • Autor: Miguel Holgado Bolaños (UPM)
  • Autor: Maria Fe Laguna Heras (UPM)
  • Autor: Rafael Casquel Del Campo (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Ingeniería y Aplicaciones del Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Grupo de Investigación: Grupo de Dispositivos Semiconductores del ISOM
  • Departamento: Física Aplicada a la Ingeniería Industrial
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)