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Descripción
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| We report the fabrication of periodic lattices of high aspect-ratio nano-pillars made of SU-8 polymeric material by using direct electron-beam writing. Process parameters are optimized in order to control proximity effects and photoacid-generator diffusion determining feature resolution and material stiffness. We demonstrate nanostructured surfaces consisting of lattices of SU-8 nano-pillars with aspectratio as high as 3.8:1, improving previous reported results significantly. We also show the capability of these structures to trap liquid¿water infiltrated among the SU-8 nano-pillars after proper chemical treatment. | |
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Internacional
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Si |
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JCR del ISI
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Si |
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Título de la revista
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MICROELECTRONIC ENGINEERING |
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ISSN
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0167-9317 |
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Factor de impacto JCR
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1,583 |
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Información de impacto
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Volumen
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87 |
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DOI
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doi:10.1016/j.mee.2009.09.007 |
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Número de revista
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4 |
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Desde la página
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663 |
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Hasta la página
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667 |
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Mes
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ABRIL |
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Ranking
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