Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Thermal stability of copper nitride thin films: The role of nitrogen migration
Year:2010
Research Areas
  • Mechanical aeronautics and naval engineering
Information
Abstract
The atomic composition, structural, morphological, and optical properties of N-rich copper nitride thin films have been investigated prior to and after annealing them in vacuum at temperatures up to 300 °C. Films were characterized by means of ion-beam analysis IBMA, X-ray diffraction XRD, atomic force microscopy AFM, and spectroscopic ellipsometry techniques SE. The data reveal that even when the total integrated over the whole thickness atomic composition of the films remains constant, nitrogen starts to migrate from the bulk to the film surface, without out-diffusing, at temperatures as low as 100 °C. This migration leads to two chemical phases with different atomic concentration of nitrogen, lattice parameters, and crystallographic orientation but with the same crystal structure. XRD experimental and Rietveld refined data seem to confirm that nitrogen excess accommodates in interstitial locations within the anti-ReO3 crystal lattice forming a solid solution. The influence of nitrogen migration on the optical electronic properties of the films will be discussed.
International
Si
JCR
No
Title
JOURNAL OF APPLIED PHYSICS 103513
ISBN
0021-8979
Impact factor JCR
0
Impact info
Volume
107
Journal number
From page
--
To page
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Month
ENERO
Ranking
Participants
  • Participante: F. AGULLO-LOPEZ (Centro de Microanálisis de Materiales)
  • Participante: N. GORDILLO (Centro de Microanálisis de Materiales)
  • Autor: Raquel Gonzalez Arrabal (UPM)
  • Participante: R. RUIZ-BUSTOS (Instituto de Energías Renovables)
  • Participante: M.S. MARTIN-GONZALEZ (Instituto de Microelectrónica de Madrid)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Fusión Nuclear Inercial y Tecnología de fusión
  • Centro o Instituto I+D+i: Instituto de Fusión Nuclear
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)