Memorias de investigación
Research Publications in journals:
UV laser-induced high resolution cleaving of Si wafers for micro/nano devices and polymeric waveguide characterization
Year:2011

Research Areas
  • Engineering

Information
Abstract
UV laser-induced high resolution cleaving of Si wafers for micro/nano devices and polymeric waveguide characterization
International
Si
JCR
Si
Title
Applied Surface Science
ISBN
0169-4332
Impact factor JCR
1,793
Impact info
Volume
257
10.1016/j.apsusc.2010.11.021
Journal number
From page
5424
To page
5428
Month
SIN MES
Ranking
Participants

Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Grupo de Investigación en Ingeniería y Aplicaciones del Láser
  • Centro o Instituto I+D+i: Centro Laser