Descripción
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This paper reports the simultaneous fabrication of Receive and Transmit Bulk Acoustic Wave filters for the WCDMA standard on the same die. Both filters are based on Solidly Mounted Resonators using a common Bragg mirror, but with each having a specific piezoelectric film thickness. Electrical measurements reveal that the process steps required to provide the two different piezoelectric film thicknesses on the same die does not impact the electrical performances of resonators and filters and that this approach could thus be generalised to more than two filters. | |
Internacional
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Si |
Nombre congreso
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2011 IEEE International Frequency Control Symposium |
Tipo de participación
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960 |
Lugar del congreso
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San Francisco, EE. UU. |
Revisores
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Si |
ISBN o ISSN
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1075-6787 |
DOI
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10.1109/FCS.2011.5977800 |
Fecha inicio congreso
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01/05/2011 |
Fecha fin congreso
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05/05/2011 |
Desde la página
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1 |
Hasta la página
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5 |
Título de las actas
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2011 IEEE International Frequency Control Symposium Proc. |