Memorias de investigación
Artículos en revistas:
Stopping power dependence of nitrogen sputtering yields in copper nitride films under swift-ion irradiation: Exciton model approach
Año:2012
Áreas de investigación
  • Fisica sm -- estructura de materiales,
  • Fisica rp -- fisica de la radiacion,
  • Fisica so -- materia condensada blanda
Datos
Descripción
Nitrogen sputtering yields as high as 104 atoms/ion, are obtained by irradiating N-rich-Cu3N films (N concentration: 33 ± 2 at.%) with Cu ions at energies in the range 10?42 MeV. The kinetics of N sputtering as a function of ion fluence is determined at several energies (stopping powers) for films deposited on both, glass and silicon substrates. The kinetic curves show that the amount of nitrogen release strongly increases with rising irradiation fluence up to reaching a saturation level at a low remaining nitrogen fraction (5?10%), in which no further nitrogen reduction is observed. The sputtering rate for nitrogen depletion is found to be independent of the substrate and to linearly increase with electronic stopping power (Se). A stopping power (Sth) threshold of ?3.5 keV/nm for nitrogen depletion has been estimated from extrapolation of the data. Experimental kinetic data have been analyzed within a bulk molecular recombination model. The microscopic mechanisms of the nitrogen depletion process are discussed in terms of a non-radiative exciton decay model. In particular, the estimated threshold is related to a minimum exciton density which is required to achieve efficient sputtering rates.
Internacional
Si
JCR del ISI
Si
Título de la revista
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials And Atoms
ISSN
0168-583X
Factor de impacto JCR
1,211
Información de impacto
Volumen
289
DOI
http://dx.doi.org/10.1016/j.nimb.2012.07.034
Número de revista
Desde la página
74
Hasta la página
78
Mes
AGOSTO
Ranking
Q2
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: Nuria Gordillo Garcia UPM
  • Autor: R. Gonzalez-Arrabal
  • Autor: A. Rivera
  • Autor: F. Munnik
  • Autor: F. Agulló-López
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Fusión Nuclear Inercial y Tecnología de fusión
  • Departamento: Ingeniería Nuclear
  • Centro o Instituto I+D+i: Instituto de Fusión Nuclear