Observatorio de I+D+i UPM

Memorias de investigación
Book chapters:
Optical waveguides fabricated by ion implantation/irradiation: A review
Year:2012
Research Areas
  • Engineering
Information
Abstract
Optical waveguides are key elements of many photonic devices; for this reason many materials and methods have been intensively studied to fabricate them. Ion implantation provides a general and flexible method to achieve this goal, with several advantages over the alternative techniques (Townsend et al., 1994). Most optical waveguides and integrated optical devices are manufactured using low-energy light ions (H and He), taking advantage of the effects caused by nuclear damage. However, this is achieved at the expense of using very high fluences (1016-1017 cm-2), which reduces the practical utility of the method
International
Si
Book Edition
Book Publishing
Edited by Mark Goorsky
ISBN
978-953-51-0634-0
Series
Book title
Ion Implantation, InTech
From page
267
To page
314
Participants
  • Autor: Ovidio Yordanis Peña Rodriguez (UPM)
  • Autor: J. Olivares (Instituto de Óptica, Consejo Superior de Investigaciones Científicas (IO-CSIC))
  • Autor: M. Carrascosa (Departamento de Física de Materiales C-IV, Universidad Autónoma de Madrid)
  • Autor: A. García-Cabañes (Departamento de Física de Materiales C-IV, Universidad Autónoma de Madrid)
  • Autor: Antonio Juan Rivera de Mena (UPM)
  • Autor: F. Agulló-López (Centro de Microanálisis de Materiales (CMAM),)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Fusión Nuclear Inercial y Tecnología de fusión
  • Departamento: Ingeniería Nuclear
  • Centro o Instituto I+D+i: Instituto de Fusión Nuclear
S2i 2021 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)