Memorias de investigación
Research Publications in journals:
Exploring polysilicon deposition conditions through a laboratory CVD prototype
Year:2012
Research Areas
  • Electric engineers, electronic and automatic (eil),
  • Electronic devices,
  • Materials for electric engineering and electronics,
  • Technology of devices for engineering
Information
Abstract
Cost and energy consumption related to obtaining polysilicon impact significantly on the total photovoltaic module cost and its energy payback time. Process simplifications can be performed, leading to cost reductions. Nowadays, among several approaches currently pursued to produce the so called Solar Grade Silicon, the chemical route, named Siemens process, is the dominant one. At the Instituto de Energía Solar research on this topic is focused on the chemical route, in particular on the polysilicon deposition step by chemical vapor deposition (CVD) from Trichlorosilane through a laboratory prototype. Valuable information about the phenomena involved in the polysilicon deposition process and the operating conditions is obtained from our experiments. A particular feature of our system is the inclusion of a mass spectrometer. The present work comprises spectra characterization of the polysilicon deposition chemical reaction, temperature and inlet gas mixture composition influence on the deposition rate and analysis of polysilicon deposition conditions for the ?pop-corn' phenomenon to appear, based on experimental experience (Actas de la Special Issue: E-MRS 2012 Spring Meeting ? Symposium A
International
Si
JCR
No
Title
Physica Status Solidi (c) - Special Issue: E-MRS 2012 Spring Meeting - Symposium A
ISBN
1610-1642
Impact factor JCR
Impact info
Volume
9
10.1002/pssc.201200161
Journal number
10-11
From page
2164
To page
2168
Month
SIN MES
Ranking
Participants
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física