Memorias de investigación
Artículos en revistas:
Exploring polysilicon deposition conditions through a laboratory CVD prototype
Año:2012
Áreas de investigación
  • Ingeniería eléctrica, electrónica y automática,
  • Dispositivos electrónicos,
  • Materiales para ingeniería eléctrica y electrónica,
  • Tecnología de dispositivos para ingeniería eléctrica y electrónica
Datos
Descripción
Cost and energy consumption related to obtaining polysilicon impact significantly on the total photovoltaic module cost and its energy payback time. Process simplifications can be performed, leading to cost reductions. Nowadays, among several approaches currently pursued to produce the so called Solar Grade Silicon, the chemical route, named Siemens process, is the dominant one. At the Instituto de Energía Solar research on this topic is focused on the chemical route, in particular on the polysilicon deposition step by chemical vapor deposition (CVD) from Trichlorosilane through a laboratory prototype. Valuable information about the phenomena involved in the polysilicon deposition process and the operating conditions is obtained from our experiments. A particular feature of our system is the inclusion of a mass spectrometer. The present work comprises spectra characterization of the polysilicon deposition chemical reaction, temperature and inlet gas mixture composition influence on the deposition rate and analysis of polysilicon deposition conditions for the ?pop-corn' phenomenon to appear, based on experimental experience (Actas de la Special Issue: E-MRS 2012 Spring Meeting ? Symposium A
Internacional
Si
JCR del ISI
No
Título de la revista
Physica Status Solidi (c) - Special Issue: E-MRS 2012 Spring Meeting - Symposium A
ISSN
1610-1642
Factor de impacto JCR
Información de impacto
Volumen
9
DOI
10.1002/pssc.201200161
Número de revista
10-11
Desde la página
2164
Hasta la página
2168
Mes
SIN MES
Ranking
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Participantes
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física