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Abstract
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| n this work, a comprehensive model on the contributions to the energy consumption of a polysilicon CVD process is developed, covering radiation, conduction and convection losses. The comprehensive model calculations are in agreement with the experimental experience with a CVD laboratory reactor at our disposal. Moreover, heat-consumption theoretical models presented in this work can be applied not only to laboratory scale CVD reactors, but to industrial scale ones. Numerical results of the radiation and convection heat loss models are applied to a 36-rod reactor. Energy consumption due to radiation heat loss can be reduced from 27.8 to 13.1kWh/kg when the emissivity of the wall is reduced from 0.7 to 0.3 and the rods? surface temperature is 1150oC. Considering thermal shields, radiation heat loss can be reduced by 30.5% and 65.8% for shield emissivities of 0.7 and 0.3, respectively. Furthermore, energy consumption due to convection heat loss along a deposition process at 1100oC is 23.6kWh/kg and the radiative loss is calculated to be 20.5kWh/kg. | |
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International
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Si |
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Congress
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Silicon for the Chemical and Solar Industry XII |
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960 |
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Place
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Trondheim, Norway |
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Reviewers
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Si |
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ISBN/ISSN
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00-0000-000-0 |
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Start Date
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23/06/2014 |
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End Date
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26/06/2014 |
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From page
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123 |
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To page
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134 |
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Proc. Silicon for the Chemical and Solar Industry XII |