Memorias de investigación
Artículos en revistas:
Building intuition of iron evolution during solar cell processing through analysis of different process models
Año:2015
Áreas de investigación
  • Dispositivos electrónicos,
  • Células solares,
  • Tecnología de dispositivos para ingeniería eléctrica y electrónica
Datos
Descripción
An important aspect of Process Simulators for photovoltaics is prediction of defect evolution during device fabrication. Over the last twenty years, these tools have accelerated process optimization, and several Process Simulators for iron, a ubiquitous and deleterious impurity in silicon, have been developed. The diversity of these tools can make it difficult to build intuition about the physics governing iron behavior during processing. Thus, in one unified software environment and using self-consistent terminology, we combine and describe three of these Simulators. We vary structural defect distribution and iron precipitation equations to create eight distinct Models, which we then use to simulate different stages of processing. We find that the structural defect distribution influences the final interstitial iron concentration ([Fe-i]) more strongly than the iron precipitation equations. We identify two regimes of iron behavior: (1) diffusivity-limited, in which iron evolution is kinetically limited and bulk [Fe-i] predictions can vary by an order of magnitude or more, and (2) solubility-limited, in which iron evolution is near thermodynamic equilibrium and the Models yield similar results. This rigorous analysis provides new intuition that can inform Process Simulation, material, and process development, and it enables scientists and engineers to choose an appropriate level of Model complexity based on wafer type and quality, processing conditions, and available computation time.
Internacional
Si
JCR del ISI
Si
Título de la revista
Applied Physics a-Materials Science & Processing
ISSN
0947-8396
Factor de impacto JCR
1,694
Información de impacto
Volumen
120
DOI
10.1007/s00339-015-9317-7
Número de revista
4
Desde la página
1357
Hasta la página
1373
Mes
SIN MES
Ranking
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Participantes
  • Autor: A.E. Morishige
  • Autor: Laine H.S.
  • Autor: Schon J.
  • Autor: A. Haarahiltunen
  • Autor: J. Hofstetter
  • Autor: Carlos del Cañizo Nadal UPM
  • Autor: M.C. Schubert
  • Autor: H. Savin
  • Autor: T. Buonassisi
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física