Memorias de investigación
Artículos en revistas:
Effect of electrically inactive posphorus versus electrically active phosphorus oniron gettering
Año:2015
Áreas de investigación
  • Tecnología de dispositivos para ingeniería eléctrica y electrónica
Datos
Descripción
In this study we investigate the efficacy of iron gettering as a function of electrically inactive phosphorus in the emitter in combination with low temperature annealing steps. To achieve different amounts of electrically inactive phosphorus in the emitter a highly doped PSG produced emitter with a large plateau depth of electrical active phosphorus is etched back stepwise by a wet-chemical procedure. Therewith we achieve a gradual reduction in electrically inactive phosphorus with small changes in electrically active phosphorus (?Rsh < 4 ?/sq). After this step, the wafers with different emitters have been annealed at 700 °C for 30 min and the content of Feiin the bulk has been measured using QSS-PC. The results show, (i) that for higher amounts of electrically inactive phosphorusa stronger iron gettering effect can be observed and (ii) that an additional annealing step leads to a significant change of Fei. This means, (i) that anelectricallyinactive phosphorus concentration dependence for iron gettering is observed and (ii) additional annealing steps, below the usual diffusion temperature of phosphorus, can be used to reduce interstitial iron in highly contaminated wafers further.
Internacional
Si
JCR del ISI
No
Título de la revista
Energy Procedia
ISSN
1876-6102
Factor de impacto JCR
Información de impacto
Volumen
77
DOI
10.1016/j.egypro.2015.07.044
Número de revista
Desde la página
311
Hasta la página
315
Mes
SIN MES
Ranking
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Participantes
  • Autor: Ana Peral Boiza UPM
  • Autor: A. Dastgheib-Shirazi
  • Autor: H. Wagner
  • Autor: G. Hahn
  • Autor: Carlos del Cañizo Nadal UPM
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física