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Descripción
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| Sensors based on thin film electroacoustic (TEA) devices have emerged as a promising alternative toquartz crystal microbalance and surface acoustic wave devices, in view of sensibility, miniaturizationand easy integration. TEA devices include quasi-shear film bulk acoustic resonators (QS-FBAR) and S0mode Lamb wave resonators (S0-LWR) based on AlN films. Despite the work done on the application ofTEA devices as in-liquid biological and chemical sensors, a theoretical framework for S0-LWRs properlydescribing their sensing mechanisms is still needed. Here we validate a finite element analysis modelon QS-FBARs and study the sensing mechanisms of S0-LWRs in liquid media. We show that S0-LWRscan sense changes in the dielectric permittivity of the liquid and demonstrate different sensitivities toviscosity and density. A complementary assessment of the S0-LWRs losses, dependent in a non-specificmanner on the square root of the density viscosity product, provides the ability to discriminate densityfrom viscosity changes on the entire device surface. Finally, with an S0-LWR optimization study we showthat resolution improves with the decrease of the membrane thickness; however, a trade-off betweensensitivity, quality factor and membrane fragility has to be considered. | |
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Internacional
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Si |
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JCR del ISI
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Si |
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Título de la revista
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Sensors And Actuators B-Chemical |
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ISSN
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0925-4005 |
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Factor de impacto JCR
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3,84 |
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Información de impacto
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Volumen
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208 |
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DOI
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10.1016/j.snb.2014.11.026 |
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Número de revista
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208 |
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Desde la página
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212 |
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Hasta la página
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219 |
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Mes
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SIN MES |
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Ranking
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