Memorias de investigación
Communications at congresses:
Transparent thin film bulk acoustic wave resonators
Year:2016

Research Areas
  • Electronic technology and of the communications

Information
Abstract
Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indium-tin oxide as the transparent material for the electrodes and a transparent acoustic reflector consisting of alternating layers of SiO2 and Ta2O5 or WO3, to ensure an adequate acoustic confinement while keeping a high transparency. The fabricated devices display an electromechanical coupling coefficient up to 4% and a quality factor Q of 100. The measured transmittance in the visible spectrum (450 - 750 nm) is 75%.
International
Si
Congress
European Frequency and Time Forum (EFTF), 2016
960
Place
York (UK)
Reviewers
Si
ISBN/ISSN
978-1-5090-0720-2
Start Date
04/04/2016
End Date
07/04/2016
From page
1
To page
4
Proceedings in European Frequency and Time Forum (EFTF), 2016
Participants

Research Group, Departaments and Institutes related
  • Creador: Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones