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Descripción
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| Abstract: The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz, giving coefficients of resonant frequency with deformation in the order of 56% per unit strain. The influence on this parameter of the resonant mode, coupling factor and frequency is analyzed. | |
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Internacional
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Si |
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Nombre congreso
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European Frequency and Time Forum (EFTF), 2016 |
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Tipo de participación
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970 |
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Lugar del congreso
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York (UK) |
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Revisores
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ISBN o ISSN
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978-1-5090-0720-2 |
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DOI
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Fecha inicio congreso
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04/04/2016 |
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Fecha fin congreso
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07/04/2016 |
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Desde la página
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1 |
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Hasta la página
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4 |
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Título de las actas
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Proceedings in European Frequency and Time Forum (EFTF), 2016 |