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Memorias de investigación
Artículos en revistas:
MEMS actuated piezoelectrically with AlN films
Año:2007
Áreas de investigación
  • Industria electrónica
Datos
Descripción
We analyse the mechanical response of a doubly-clamped microbridge actuated piezoelectrically using sputtered AlN, working first as an actuator and then as a resonator. The quasi-static response of the microbridge under DC electrical excitation is measured. Out-of-plane displacements as high as 0.22 mum/V are obtained, which provides an actuation response suitable for RF switching applications. On the other hand, the resonance frequencies of the microbridges are determined by means of laser interferometry. We compare the response of microbridges with different dimensions and different initial buckling (induced by the residual stress of the layers). We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. For a given resonator, a DC bias added to the AC excitation signal allows to fine-tune the resonance frequencies. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 mum-long microbridge.
Internacional
No
JCR del ISI
No
Título de la revista
2007 Spanish Conference on Electron Devices
ISSN
1-4244-0869-5
Factor de impacto JCR
0
Información de impacto
Volumen
DOI
Número de revista
0
Desde la página
226
Hasta la página
229
Mes
SIN MES
Ranking
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: Lucía Vergara Herrero (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Sheila González Castilla (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Javier Malo Gomez (UPM)
  • Autor: Jose Ignacio Izpura Torres (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
  • Departamento: Sistemas Electrónicos y de Control
  • Departamento: Ingeniería Electrónica
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