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Memorias de investigación
Artículos en revistas:
Circuital model for the analysis of the characteristics of SAW devices of AlN film on non-insulating substrates
Año:2007
Áreas de investigación
  • Industria electrónica
Datos
Descripción
In this paper we describe a method to assess the piezoelectric response of a piezoelectric thin film deposited on a conductive substrate. It is based on analyzing the frequency response of a surface acoustic wave (SAW) filter made on the piezoelectric thin film. For this analysis, we use a circuital model that takes into account the theoretical response of the ideal filter along with all the external and internal parasitic effects that deteriorate the response. Using this model, we can obtain the electromechanical coupling factor of the piezoelectric material (kk2m) with good accuracy. If parasitic effects are not considered, kk2 m can be underestimated by a factor of up to 20. We have tested our model using SAW filters made on AlN thin films sputtered on substrates with different conductivities. A discussion on the relation between the different circuital elements and the physical properties of the filters also is provided.
Internacional
Si
JCR del ISI
Si
Título de la revista
IEEE T ULTRASON FERR
ISSN
0885-3010
Factor de impacto JCR
1,654
Información de impacto
Volumen
54
DOI
Número de revista
0
Desde la página
2367
Hasta la página
2375
Mes
SIN MES
Ranking
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Alfredo Sanz Hervas (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Lucía Vergara Herrero (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
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