Memorias de investigación
Communications at congresses:
Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances
Year:2019
Research Areas
  • Sensor devices,
  • Other electronic devices,
  • Materials for electric engineering and electronics,
  • Technology of devices for engineering
Information
Abstract
Next generations of physical and chemical vacuum deposition systems require more accurate and faster sensors to monitor the deposition of very thin films (nm range). Acoustic sensors, particularly QCMs, have been typically used in such systems. However, their potential has reached certain limitations. They are bulky, they need a water-cooling system to work at higher temperatures, and for certain applications their response time is not fast enough. For many years, film bulk acoustic wave resonators (FBARs) working at higher frequencies have been studied as a higher sensitivity alternative to QCMs, particularly in biosensing applications. However, they have been never applied and simultaneously compared to QCMs in an actual PVD system so far. Sorex Sensors has developed an FBAR which not only offers higher mass sensitivity than QCMs but also allows discriminating temperature related effects within the same device without the need of a reference sensor. FBARs can also be integrated in arrays providing a cost-effective and more accurate solution for thin film monitoring. This sensor has been tested simultaneously with a commercial QCM in an evaporator, for benchmarking the characteristic of both technologies in terms of sensitivity.
International
Si
Congress
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
960
Place
Glasgow, UK
Reviewers
Si
ISBN/ISSN
1948-5719
Start Date
06/10/2019
End Date
09/10/2019
From page
600
To page
602
PROCEEDINGS OF THE 2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
Participants
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica